Granted Patent
Utility
US 5,440,931 · App. 08/142,236
Reference element for high accuracy silicon capacitive pressure sensor
Inventors:
Walter J. Wiegand, Frank W. Gobetz, Robert H. Bullis
Patented Case
View Patent ↗
Granted: Aug 15, 1995
Filed: Oct 25, 1993
Inventors
Walter J. Wiegand
Frank W. Gobetz
Robert H. Bullis
Assignee (at issue)
UNITED TECHNOLOGIES CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.