Granted Patent
Utility
US 5,447,883 · App. 08/329,860
Method of manufacturing semiconductor device
Inventor:
Kuniaki Koyama
Patented Case
View Patent ↗
Granted: Sep 5, 1995
Filed: Oct 27, 1994
Inventor
Kuniaki Koyama
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.