Granted Patent
Utility
US 5,447,884 · App. 08/268,378
Shallow trench isolation with thin nitride liner
Inventors:
Paul Fahey, Erwin Hammerl, Herbert L. Ho, Mutsuo Morikado
Patented Case
View Patent ↗
Granted: Sep 5, 1995
Filed: Jun 29, 1994
Inventors
Paul Fahey
Erwin Hammerl
Herbert L. Ho
Mutsuo Morikado
Assignee (at issue)
International Business Machines Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.