IP Library Granted Patent US 5,449,270
Granted Patent Utility
US 5,449,270 · App. 08/265,542

Tangential flow pumping channel for turbomolecular pumps

Inventors: Giampaolo Levi, John C. Helmer
Patented Case View Patent ↗
Granted: Sep 12, 1995 Filed: Jun 24, 1994
Inventors
Giampaolo Levi
John C. Helmer
Assignee (at issue)
Varian, Inc.

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Quick Facts
Patent No.
US 5,449,270
App. No.
08/265,542
Filed
1994-06-24
Granted
1995-09-12
Kind
A