IP Library › Granted Patent US 5,452,053
Granted Patent Utility
US 5,452,053 · App. 08/307,155

Wafer stepper

Inventor: Hiroshi Nozue
Patented Case View Patent ↗
Granted: Sep 19, 1995 Filed: Sep 16, 1994
Inventor
Hiroshi Nozue
Assignee (at issue)
NEC CORPORATION

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Quick Facts
Patent No.
US 5,452,053
App. No.
08/307,155
Filed
1994-09-16
Granted
1995-09-19
Kind
A