IP Library › Granted Patent US 5,454,847
Granted Patent Utility
US 5,454,847 · App. 08/121,884

Vapor deposition method for depositing a film of fluorine-containing glass on a substrate

Inventors: Charles Jacoboni, Brigitte Boulard, Olivier Perrot
Patented Case View Patent ↗
Granted: Oct 3, 1995 Filed: Sep 17, 1993
Inventors
Charles Jacoboni
Brigitte Boulard
Olivier Perrot
Assignee (at issue)
Alcatel Alsthom Compagnie Generale d'Electricite

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Quick Facts
Patent No.
US 5,454,847
App. No.
08/121,884
Filed
1993-09-17
Granted
1995-10-03
Kind
A