Granted Patent
Utility
US 5,454,901 · App. 07/703,726
Process for treating semiconductor substrates
Inventor:
Mikio Tsuji
Patented Case
View Patent ↗
Granted: Oct 3, 1995
Filed: May 21, 1991
Inventor
Mikio Tsuji
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.