IP Library Granted Patent US 5,456,575
Granted Patent Utility
US 5,456,575 · App. 08/242,937

Non-centric improved pumping stage for turbomolecular pumps

Inventors: John C. Helmer, Giampaolo Levi
Patented Case View Patent ↗
Granted: Oct 10, 1995 Filed: May 16, 1994
Inventors
John C. Helmer
Giampaolo Levi
Assignee (at issue)
Varian, Inc.

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Quick Facts
Patent No.
US 5,456,575
App. No.
08/242,937
Filed
1994-05-16
Granted
1995-10-10
Kind
A