Granted Patent
Utility
US 5,456,627 · App. 08/148,906
Conditioner for a polishing pad and method therefor
Inventors:
Paul David Jackson, Stephen C. Schultz, James E. Sanford, Glen Ong, Richard B. Rice, Parag S. Modi, John G. Baca
Patented Case
View Patent ↗
Granted: Oct 10, 1995
Filed: Dec 20, 1993
Inventors
Paul David Jackson
Stephen C. Schultz
James E. Sanford
Glen Ong
Richard B. Rice
Parag S. Modi
John G. Baca
Assignee (at issue)
Westech Systems, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.