IP Library › Granted Patent US 5,456,815
Granted Patent Utility
US 5,456,815 · App. 08/364,073

Sputtering targets of high-purity aluminum or alloy thereof

Inventors: Hideaki Fukuyo, Susumu Sawada, Masaru Nagasawa
Patented Case View Patent ↗
Granted: Oct 10, 1995 Filed: Dec 27, 1994
Inventors
Hideaki Fukuyo
Susumu Sawada
Masaru Nagasawa
Assignee (at issue)
Japan Energy Corporation

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Quick Facts
Patent No.
US 5,456,815
App. No.
08/364,073
Filed
1994-12-27
Granted
1995-10-10
Kind
A