Granted Patent
Utility
US 5,458,918 · App. 08/171,265
Gas injectors for reaction chambers in CVD systems
Inventors:
Mark Hawkins, McDonald Robinson
Patented Case
View Patent ↗
Granted: Oct 17, 1995
Filed: Dec 21, 1993
Inventors
Mark Hawkins
McDonald Robinson
Assignee (at issue)
Advanced Semiconductor Materials America, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.