Granted Patent
Utility
US 5,459,408 · App. 08/216,753
Measurement of semiconductor parameters at cryogenic temperatures using a spring contact probe to form a MIS device
Inventor:
Men-Chee Chen
Patented Case
View Patent ↗
Granted: Oct 17, 1995
Filed: Mar 23, 1994
Inventor
Men-Chee Chen
Assignee (at issue)
Texas Instruments Incorporated
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.