Granted Patent
Utility
US 5,464,664 · App. 08/204,792
Downstream ammonia plasma passivation of GaAs
Inventors:
Eray S. Aydil, Konstantinos P. Giapis, Richard A. Gottscho
Patented Case
View Patent ↗
Granted: Nov 7, 1995
Filed: Mar 1, 1994
Inventors
Eray S. Aydil
Konstantinos P. Giapis
Richard A. Gottscho
Assignee (at issue)
AT & T IPM Corp.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.