Granted Patent
Utility
US 5,464,786 · App. 08/328,095
Method for forming a capacitor having recessed lateral reaction barrier layer edges
Inventors:
Thomas A. Figura, Paul J. Schuele
Patented Case
View Patent ↗
Granted: Nov 7, 1995
Filed: Oct 24, 1994
Inventors
Thomas A. Figura
Paul J. Schuele
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.