Granted Patent
Utility
US 5,466,932 · App. 08/320,614
Micro-miniature piezoelectric diaphragm pump for the low pressure pumping of gases
Inventors:
Robert M. Young, Carl B. Freidhoff, Dennis L. Polla, Peter J. Schiller
Patented Case
View Patent ↗
Granted: Nov 14, 1995
Filed: Oct 7, 1994
Inventors
Robert M. Young
Carl B. Freidhoff
Dennis L. Polla
Peter J. Schiller
Assignee (at issue)
Westinghouse Electric Company LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.