Granted Patent
Utility
US 5,468,595 · App. 08/202,446
Method for three-dimensional control of solubility properties of resist layers
Inventor:
William R. Livesay
Patented Case
View Patent ↗
Granted: Nov 21, 1995
Filed: Feb 28, 1994
Inventor
William R. Livesay
Assignee (at issue)
Electron Vision Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.