Granted Patent
Utility
US 5,468,657 · App. 08/261,443
Nitridation of SIMOX buried oxide
Inventor:
Sheng Teng Hsu
Patented Case
View Patent ↗
Granted: Nov 21, 1995
Filed: Jun 17, 1994
Inventor
Sheng Teng Hsu
Assignees (at issue)
Sharp Microelectronics Technology Inc.
SHARP KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.