Granted Patent
Utility
US 5,468,686 · App. 08/351,074
Method of cleaning an etching chamber of a dry etching system
Inventor:
Hiedaki Kawamoto
Patented Case
View Patent ↗
Granted: Nov 21, 1995
Filed: Nov 30, 1994
Inventor
Hiedaki Kawamoto
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.