Granted Patent
Utility
US 5,472,513 · App. 08/360,417
Cleaning method for semiconductor substrate
Inventor:
Yoshimi Shiramizu
Patented Case
View Patent ↗
Granted: Dec 5, 1995
Filed: Dec 21, 1994
Inventor
Yoshimi Shiramizu
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.