Granted Patent
Utility
US 5,472,891 · App. 08/260,229
Method of manufacturing a semiconductor device
Inventors:
Kazuhiro Komori, Satoshi Meguro, Takaaki Hagiwara, Hitoshi Kume, Toshihisa Tsukuda, Hideaki Yamamoto
Patented Case
View Patent ↗
Granted: Dec 5, 1995
Filed: Jun 14, 1994
Inventors
Kazuhiro Komori
Satoshi Meguro
Takaaki Hagiwara
Hitoshi Kume
Toshihisa Tsukuda
Hideaki Yamamoto
Assignee (at issue)
HITACHI, LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.