IP Library › Granted Patent US 5,474,647
Granted Patent Utility
US 5,474,647 · App. 08/153,236

Wafer flow architecture for production wafer processing

Inventors: Sherman K. Poultney, Peter B. Mumola, Joseph P. Prusak, George J. Gardopee, Thomas J. McHugh
Patented Case View Patent ↗
Granted: Dec 12, 1995 Filed: Nov 15, 1993
Inventors
Sherman K. Poultney
Peter B. Mumola
Joseph P. Prusak
George J. Gardopee
Thomas J. McHugh
Assignee (at issue)
Hughes Aircraft Company

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Quick Facts
Patent No.
US 5,474,647
App. No.
08/153,236
Filed
1993-11-15
Granted
1995-12-12
Kind
A