IP Library Granted Patent US 5,477,701
Granted Patent Utility
US 5,477,701 · App. 08/433,594

Apparatus and method for mass flow control of a working fluid

Inventors: Richard L. Kenyon, Roy M. Yabuki, Chester D. Campbell, Sandra L. Harper, Michael Nolan, Virender Jain, Alan Matthies
Patented Case View Patent ↗
Granted: Dec 26, 1995 Filed: May 3, 1995
Inventors
Richard L. Kenyon
Roy M. Yabuki
Chester D. Campbell
Sandra L. Harper
Michael Nolan
Virender Jain
Alan Matthies
Assignee (at issue)
Parker-Hannifin Corporation

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Quick Facts
Patent No.
US 5,477,701
App. No.
08/433,594
Filed
1995-05-03
Granted
1995-12-26
Kind
A