Granted Patent
Utility
US 5,478,396 · App. 08/296,964
Production of high-purity polycrystalline silicon rod for semiconductor applications
Inventors:
David W. Keck, Kenichi Nagai, Yoshifumi Yatsurugi, Hiroshi Morihara, Junji Izawa
Patented Case
View Patent ↗
Granted: Dec 26, 1995
Filed: Aug 26, 1994
Inventors
David W. Keck
Kenichi Nagai
Yoshifumi Yatsurugi
Hiroshi Morihara
Junji Izawa
Assignee (at issue)
Advanced Silicon Materials LLC
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.