Granted Patent
Utility
US 5,480,051 · App. 08/235,987
Method for the anisotropic etching of an aluminiferous layer
Inventor:
Manfred Hain
Patented Case
View Patent ↗
Granted: Jan 2, 1996
Filed: May 2, 1994
Inventor
Manfred Hain
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.