IP Library Granted Patent US 5,480,488
Granted Patent Utility
US 5,480,488 · App. 08/141,363

Apparatus for supplying CVD coating devices

Inventors: Hans-Joachim Bittner, Hans-Jurgen Klein, Thomas Kupper, Ewald Morsen
Patented Case View Patent ↗
Granted: Jan 2, 1996 Filed: Oct 28, 1993
Inventors
Hans-Joachim Bittner
Hans-Jurgen Klein
Thomas Kupper
Ewald Morsen
Assignee (at issue)
Schott Glaswerke

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Quick Facts
Patent No.
US 5,480,488
App. No.
08/141,363
Filed
1993-10-28
Granted
1996-01-02
Kind
A