IP Library Granted Patent US 5,482,430
Granted Patent Utility
US 5,482,430 · App. 08/309,226

High performance turbomolecular vacuum pumps

Inventor: Marsbed Hablanian
Patented Case View Patent ↗
Granted: Jan 9, 1996 Filed: Sep 20, 1994
Inventor
Marsbed Hablanian
Assignee (at issue)
Varian, Inc.

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Quick Facts
Patent No.
US 5,482,430
App. No.
08/309,226
Filed
1994-09-20
Granted
1996-01-09
Kind
A