Granted Patent
Utility
US 5,486,129 · App. 08/112,759
System and method for real-time control of semiconductor a wafer polishing, and a polishing head
Inventors:
Gurtej S. Sandhu, Trung T. Doan
Patented Case
View Patent ↗
Granted: Jan 23, 1996
Filed: Aug 25, 1993
Inventors
Gurtej S. Sandhu
Trung T. Doan
Assignee (at issue)
Micron Technology, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.