Granted Patent
Utility
US 5,486,131 · App. 08/177,156
Device for conditioning polishing pads
Inventors:
Joseph V. Cesna, Anthony G. Van Woerkom
Patented Case
View Patent ↗
Granted: Jan 23, 1996
Filed: Jan 4, 1994
Inventors
Joseph V. Cesna
Anthony G. Van Woerkom
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.