Granted Patent
Utility
US 5,486,424 · App. 08/191,701
Silylated photoresist layer and planarizing method
Inventors:
Tatsuo Nakato, David A. Vidusek
Patented Case
View Patent ↗
Granted: Jan 23, 1996
Filed: Feb 4, 1994
Inventors
Tatsuo Nakato
David A. Vidusek
Assignee (at issue)
SHARP KABUSHIKI KAISHA
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.