Granted Patent
Utility
US 5,486,447 · App. 08/330,227
Negative resists with high thermal stability comprising end capped polybenzoxazole and bisazide
Inventors:
Albert Hammerschmidt, Eberhard Kuhn, Erwin Schmidt
Patented Case
View Patent ↗
Granted: Jan 23, 1996
Filed: Oct 27, 1994
Inventors
Albert Hammerschmidt
Eberhard Kuhn
Erwin Schmidt
Assignee (at issue)
Siemens Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.