Granted Patent
Utility
US 5,486,702 · App. 08/125,117
Scan technique to reduce transient wafer temperatures during ion implantation
Inventors:
John P. O'Connor, John W. Smith
Patented Case
View Patent ↗
Granted: Jan 23, 1996
Filed: Sep 21, 1993
Inventors
John P. O'Connor
John W. Smith
Assignee (at issue)
Genus, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.