Granted Patent
Utility
US 5,487,821 · App. 08/425,671
Anode structure for magnetron sputtering systems
Inventors:
Peter A. Sieck, Russell J. Hill, John L. Vossen, Jr., Stephen C. Schulz
Patented Case
View Patent ↗
Granted: Jan 30, 1996
Filed: Apr 18, 1995
Inventors
Peter A. Sieck
Russell J. Hill
John L. Vossen, Jr.
Stephen C. Schulz
Assignee (at issue)
The BOC Group Limited
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.