Granted Patent
Utility
US 5,489,552 · App. 08/366,529
Multiple layer tungsten deposition process
Inventors:
Sailesh Mansinh Merchant, Arun K. Nanda, Pradip K. Roy
Patented Case
View Patent ↗
Granted: Feb 6, 1996
Filed: Dec 30, 1994
Inventors
Sailesh Mansinh Merchant
Arun K. Nanda
Pradip K. Roy
Assignee (at issue)
AT&T CORP.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.