Granted Patent
Utility
US 5,489,557 · App. 08/391,724
Methods for processing semiconductors to reduce surface particles
Inventor:
Michael Jolley
Patented Case
View Patent ↗
Granted: Feb 6, 1996
Filed: Feb 21, 1995
Inventor
Michael Jolley
Assignee (at issue)
Semitool, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.