Granted Patent
Utility
US 5,490,421 · App. 08/376,051
Semi-conductor acceleration sensor having thin beam supported weight
Inventor:
Katsumichi Ueyanagi
Patented Case
View Patent ↗
Granted: Feb 13, 1996
Filed: Jan 23, 1995
Inventor
Katsumichi Ueyanagi
Assignees (at issue)
FUJI ELECTRIC CO., LTD.
FUJITSU TEN LIMITED
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.