Granted Patent
Utility
US 5,490,761 · App. 08/469,970
High performance turbomolecular vacuum pumps
Inventor:
Marsbed Hablanian
Patented Case
View Patent ↗
Granted: Feb 13, 1996
Filed: Jun 6, 1995
Inventor
Marsbed Hablanian
Assignee (at issue)
Varian, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.