Granted Patent
Utility
US 5,490,913 · App. 08/236,535
Magnetic field enhanced sputtering arrangement with vacuum treatment apparatus
Inventors:
Roman Schertler, Walter Haag, Peter Kohler
Patented Case
View Patent ↗
Granted: Feb 13, 1996
Filed: May 2, 1994
Inventors
Roman Schertler
Walter Haag
Peter Kohler
Assignee (at issue)
Balzers Aktiengesellschaft
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.