Granted Patent
Utility
US 5,492,855 · App. 08/364,115
Method of dry etching platinum using sulfur containing gas
Inventors:
Shoji Matsumoto, Hideo Nikou, Satoshi Nakagawa
Patented Case
View Patent ↗
Granted: Feb 20, 1996
Filed: Dec 27, 1994
Inventors
Shoji Matsumoto
Hideo Nikou
Satoshi Nakagawa
Assignee (at issue)
Matsushita Electronics Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.