Granted Patent
Utility
US 5,492,864 · App. 08/294,727
Method and equipment for manufacturing a semiconductor device
Inventor:
Yoshiharu Saitoh
Patented Case
View Patent ↗
Granted: Feb 20, 1996
Filed: Aug 22, 1994
Inventor
Yoshiharu Saitoh
Assignee (at issue)
NEC CORPORATION
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.