Granted Patent
Utility
US 5,494,524 · App. 08/166,999
Vertical heat treatment device for semiconductor
Inventors:
Takeshi Inaba, Eiichi Toya, Takashi Tanaka, Yasumi Sasaki
Patented Case
View Patent ↗
Granted: Feb 27, 1996
Filed: Dec 16, 1993
Inventors
Takeshi Inaba
Eiichi Toya
Takashi Tanaka
Yasumi Sasaki
Assignee (at issue)
Toshiba Ceramics Co., Ltd.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.