Granted Patent
Utility
US 5,494,697 · App. 08/152,776
Process for fabricating a device using an ellipsometric technique
Inventors:
Nadine Blayo, Dale E. Ibbotson, Tseng-Chung Lee
Patented Case
View Patent ↗
Granted: Feb 27, 1996
Filed: Nov 15, 1993
Inventors
Nadine Blayo
Dale E. Ibbotson
Tseng-Chung Lee
Assignee (at issue)
AT&T CORP.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.