IP Library Granted Patent US 5,494,777
Granted Patent Utility
US 5,494,777 · App. 08/229,677

Radiation sensitive resin composition

Inventors: Shinji Shiraki, Hidetoshi Miyamoto, Masaaki Inoue, Toshiyuki Ota, Yoshiji Yumoto, Takao Miura
Patented Case View Patent ↗
Granted: Feb 27, 1996 Filed: Apr 19, 1994
Inventors
Shinji Shiraki
Hidetoshi Miyamoto
Masaaki Inoue
Toshiyuki Ota
Yoshiji Yumoto
Takao Miura
Assignee (at issue)
Japan Synthetic Rubber Corporation

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Quick Facts
Patent No.
US 5,494,777
App. No.
08/229,677
Filed
1994-04-19
Granted
1996-02-27
Kind
A