Granted Patent
Utility
US 5,494,785 · App. 08/373,685
High ortho-ortho bonded novolak binder resins and their use in a process for forming positive resist patterns
Inventors:
Joseph J. Sizensky, Thomas R. Sarubbi, Medhat A. Toukhy
Patented Case
View Patent ↗
Granted: Feb 27, 1996
Filed: Jan 17, 1995
Inventors
Joseph J. Sizensky
Thomas R. Sarubbi
Medhat A. Toukhy
Assignee (at issue)
OCG Microelectronic Materials, Inc.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.