Granted Patent
Utility
US 5,494,840 · App. 08/081,371
Method for manufacturing DRAM memory cells having a thin metal oxide film on a thin metal film
Inventor:
Tadahiro Ohmi
Patented Case
View Patent ↗
Granted: Feb 27, 1996
Filed: Oct 13, 1993
Inventor
Tadahiro Ohmi
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.