IP Library › Granted Patent US 5,494,849
Granted Patent Utility
US 5,494,849 · App. 08/409,208

Single-etch stop process for the manufacture of silicon-on-insulator substrates

Inventors: Subramanian S. Iyer, Emil Baran, Mark Mastroianni, Robert A. Craven
Patented Case View Patent ↗
Granted: Feb 27, 1996 Filed: Mar 23, 1995
Inventors
Subramanian S. Iyer
Emil Baran
Mark Mastroianni
Robert A. Craven
Assignee (at issue)
SiBond, L.L.C.

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Quick Facts
Patent No.
US 5,494,849
App. No.
08/409,208
Filed
1995-03-23
Granted
1996-02-27
Kind
A