IP Library Granted Patent US 5,494,978
Granted Patent Utility
US 5,494,978 · App. 08/346,845

Modified polysilazane and process for preparation thereof

Inventors: Yasuo Shimizu, Yuuji Tashiro, Hiroyuki Aoki, Masaaki Ichiyama, Hayato Nishii, Toshihide Kishi, Kouji Okuda, Takeshi Isoda
Patented Case View Patent ↗
Granted: Feb 27, 1996 Filed: Nov 30, 1994
Inventors
Yasuo Shimizu
Yuuji Tashiro
Hiroyuki Aoki
Masaaki Ichiyama
Hayato Nishii
Toshihide Kishi
Kouji Okuda
Takeshi Isoda
Assignee (at issue)
Tonen Corporation

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Quick Facts
Patent No.
US 5,494,978
App. No.
08/346,845
Filed
1994-11-30
Granted
1996-02-27
Kind
A