Granted Patent
Utility
US 5,498,199 · App. 08/276,158
Wafer polishing method and apparatus
Inventors:
Chris Karlsrud, Anthony G. Van Woerkom, Shigeru Odagiri, Isao Nagahashi, Spencer Preston
Patented Case
View Patent ↗
Granted: Mar 12, 1996
Filed: Jul 15, 1994
Inventors
Chris Karlsrud
Anthony G. Van Woerkom
Shigeru Odagiri
Isao Nagahashi
Spencer Preston
Assignee (at issue)
SPEEDFAM CO., LTD.
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.