Granted Patent
Utility
US 5,498,290 · App. 08/113,552
Confinement of secondary electrons in plasma ion processing
Inventors:
Jesse N. Matossian, John D. Williams
Patented Case
View Patent ↗
Granted: Mar 12, 1996
Filed: Aug 27, 1993
Inventors
Jesse N. Matossian
John D. Williams
Assignee (at issue)
Hughes Aircraft Company
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.