IP Library › Granted Patent US 5,498,293
Granted Patent Utility
US 5,498,293 · App. 08/264,858

Cleaning wafer substrates of metal contamination while maintaining wafer smoothness

Inventors: Joseph M. Ilardi, George Schwartzkopf
Patented Case View Patent ↗
Granted: Mar 12, 1996 Filed: Jun 23, 1994
Inventors
Joseph M. Ilardi
George Schwartzkopf
Assignee (at issue)
Mallinckrodt Baker, Inc.

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Quick Facts
Patent No.
US 5,498,293
App. No.
08/264,858
Filed
1994-06-23
Granted
1996-03-12
Kind
A