Granted Patent
Utility
US 5,499,733 · App. 08/122,207
Optical techniques of measuring endpoint during the processing of material layers in an optically hostile environment
Inventor:
Herbert E. Litvak
Patented Case
View Patent ↗
Granted: Mar 19, 1996
Filed: Sep 16, 1993
Inventor
Herbert E. Litvak
Assignee (at issue)
Luxtron Corporation
This patent predates the USPTO's electronic file wrapper — prosecution documents from this era exist only in the Patent Office's paper records. A certified copy of the file history can be ordered from the USPTO's paper archives.